lecturer:"Stefan Blunier"

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Embedded MEMS Lab

151-0620-00L 2004S , 2005S , 2006S , 2006W , 2007S , 2007W , 2008S , 2008W , 2020S , 2020W , 2021S , 2021W , 2022S , 2022W , 2023S , 2023W , 2024S , 2024W , 2025S , 2025W , 2026S 5 Credits DR , MSC D-MATL , D-MAVT , D-PHYS , D-ITET

Practical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report.

Micromechanical Sensors and Actuators

Mikromechanische Sensoren und Aktoren

VVZ CR

151-0537-00L 2004W , 2005W , 2006W , 2007W , 2008W 3 Credits BSC , MSC D-ITET , D-MAVT

The Lecture gives an overview of the huge variety of micromechanical sensors and actuators. The fundamental issues of sensor-actuator-systems, the physical principles which are used and a lot of examples are explained.