VVZ API is not affiliated with ETH Zurich. Data might be outdated or incorrect. Please view the official ETHZ Vorlesungsverzeichnis for binding information.

151-0620-00L 5 Credits DR , MSC D-MATL , D-PHYS , D-MAVT , D-ITET
You're viewing possible stale or outdated data. Please check the latest semester for more up-to-date information.

Embedded MEMS Lab

Lecturers & Examiners: Prof. Dr. Christofer Hierold, Dr. Miroslav Haluska
VVZ CR n/a

Last Updated: 2026-02-05 16:22:29

Abstract

Practical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report.

Objective

Students learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.

Content

With guidance from a tutor, the individual silicon microsystem process steps that are required for the fabrication of an accelerometer are carried out: - Photolithography, dry etching, wet etching, sacrificial layer etching, various cleaning procedures - Packaging and electrical connection of a MEMS device - Testing and characterization of the MEMS device - Written documentation and evaluation of the entire production, processing and characterization

Resources

Lecture Notes

A document containing theory, background and practical course content is distributed in the informational meeting.

Literature

The document provides sufficient information for the participants to successfully participate in the course.

General Information

Language
English
Levels
DR , MSC
Frequency
Semesterly recurring

Examination

Type
graded semester performance

Course Components

Type Title Time & Place Hours
practical/laboratory course Embedded MEMS Lab
- First part of the compulsory introductory lecture: Wed 22.02.2023 at 13:15-18:00 (venue:ML E 12). - Second part of the compulsory introductory lecture: Wed 01.03.2023 at 13:15-18:00 (venue: ML H 37.1). - Group activities in five groups start from the 3rd week on Wednesdays at 13:15-14:00. - Practical portion of the course in the cleanrooms of FIRST-CLA consecutive: Wednesdays from 13:00 (exact) to ~18:30 during the Semester. Starting days for groups are staggered. - Attendance is required at all meetings of the course.
  • Wed 13:15-14:00 (CAB G 57)
  • Wed 13:15-14:00 (CLA G 2)
  • Wed 13:15-14:00 (HG D 5.1)
  • Wed 13:15-14:00 (ML H 34.3)
  • Wed 13:15-14:00 (NO E 11)
  • 22.02 Date 13:15-18:00 (ML E 12)
  • 01.03 Date 13:15-18:00 (ML H 37.1)
45 h semesterly

Offered In