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151-0620-00L 5 Credits MSC D-ITET , D-PHYS , D-MAVT
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Embedded MEMS Lab

Lecturers & Examiners: Prof. Dr. Christofer Hierold
VVZ CR n/a

Last Updated: 2026-02-05 15:29:35

Abstract

Practical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report. Limited access, see "Besonderes."

Objective

Students learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.

Content

With guidance from a tutor, the individual silicon microsystem process steps that are required for the fabrication of an accelerometer are carried out: - Photolithography, dry etching, wet etching, sacrificial layer etching, critical point drying, various cleaning procedures - Packaging and electrical connection of a MEMS device - Testing and characterization of the MEMS device - Written documentation and evaluation of the entire production, processing and characterization

Resources

Lecture Notes

A document containing theory, background and practical course content is distributed in the informational meeting.

Literature

The document provides sufficient information for the participants to successfully participate in the course.

General Information

Language
English
Levels
MSC
Frequency
Yearly recurring

Examination

Type
graded semester performance

Course Components

Type Title Time & Place Hours
practical/laboratory course Embedded MEMS Lab
Introduction to the course and distribution of the script: Feb 20, 13:00-14:00 Introductory lectures: Feb 20, 13:00-18:00 and Feb 27 13:00-18:00 in HG E21 Practical portion of the course will be carried out in the cleanrooms and laboratories (as per instructions on introductory lectures) Attendance at all scheduled course meeting times is required.
  • Wed 13:15-14:00 (HG E 5)
  • Wed 13:15-14:00 (HG F 7)
  • Wed 13:15-14:00 (ML H 44)
  • 20.02 Date 13:15-18:00 (HG E 21)
  • 27.02 Date 13:15-18:00 (HG E 21)
120 h semesterly

Offered In