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Embedded MEMS Lab
Last Updated: 2026-06-03 00:14:17
Abstract
Practical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report.
Objective
Students learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.
Content
With guidance from a tutor, the individual silicon microsystem process steps that are required for the fabrication of an accelerometer are carried out: - Photolithography, dry etching, wet etching, sacrificial layer etching, various cleaning procedures - Packaging and electrical connection of a MEMS device - Testing and characterization of the MEMS device - Written documentation and evaluation of the entire production, processing and characterization
Resources
Lecture Notes
A document containing theory, background and practical course content is distributed in the informational meeting.
Literature
The document provides sufficient information for the participants to successfully participate in the course.
General Information
- Language
- English
- Levels
- DR , MSC
- Frequency
- Semesterly recurring
Examination
- Type
- graded semester performance
Course Components
| Type | Title | Time & Place | Hours |
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| practical/laboratory course |
Embedded MEMS Lab
This course will be offered for the last time in the Spring Semester 2026.
- First part of the compulsory introductory lecture: Wednesday 18.02.2026 from 13: 15h to 18h (venue: tbd)
- Second part of the compulsory introductory lecture: Wednesday 25.02.2026 from 13: 15h to 18h (venue: tbd)
- Group activities in five groups start from the 3rd week on Wednesdays at 13:15-14:00.
- Practical portion of the course in the cleanrooms of FIRST-CLA consecutive: during the Semester. Starting days for groups are staggered.
- Attendance is required at all meetings of the course.
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45 h semesterly |
Offered In
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Core Courses (The Core Courses in the Master’s program Mechanical Engineering listed below are indicative and include courses designed by the Department at the Master's level. With the approval of the tutor, students may also select Master's-level courses offered by other departments at ETH. These courses will be marked as non-regular in the LAG, but their categorization as Core Courses is possible if included in the approved LAG.)
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Track: Electronics and Photonics (The core courses and specialization courses below are a selection for students who wish to specialize in the area of "Electronics and Photonics", see . The individual study plan is subject to the tutor's approval.)
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Specialization Courses (These specialization courses are particularly recommended for the area of "Electronics and Photonics", but you are free to choose courses from any other field in agreement with your tutor. Semester / Research Projects are not allowed in this category. A minimum of 40 credits must be obtained from specialization courses during the Master's Programme.)
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General Electives (Students may choose General Electives from the entire course programme of ETH Zurich - with the following restrictions: courses that belong to the first or second year of a Bachelor curriculum at ETH Zurich as well as courses from GESS "Science in Perspective" are not eligible here. The following courses are explicitly recommended to physics students by their lecturers. (Courses in this list may be assigned to the category "General Electives" directly in myStudies. For the category assignment of other eligible courses keep the choice "no category" and take contact with the Study Administration ( ) after having received the credits.))
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Doctorate Materials Science (Further information at: )
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