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151-0620-00L 4 Credits
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Embedded MEMS Lab

Lecturers & Examiners: Prof. Dr. Christofer Hierold
VVZ CR n/a

Last Updated: 2026-02-05 15:02:46

Abstract

Practical course: Students are introduced into the unit process steps for the fabrication of a MEMS (Micro Electro Mechanical System) which will be carried out in the labs and clean rooms by themselves. Additionally they learn the special requirements for working in clean rooms. The processing and characterization will be documented and analyzed by a final report.

Objective

Students learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.

Content

With guidance from a mentor, the individual silicon microsystem process steps that are required for the fabrication of a MEMS device are carried out: - Photolithography, dry etching, wet etching, sacrificial layer etching, critical point drying, various cleaning procedures - Packaging and electrical connection of a MEMS device - Testing and characterization of the MEMS device - Written documentation and evaluation of the entire production, processing and characterization

Resources

Lecture Notes

A document containing theory, background and practical course content is distributed in the informational meeting.

Literature

The document provides sufficient information for the participants to successfully participate in the course.

General Information

Language
German
Frequency
Yearly recurring

Examination

Type
graded semester performance

Course Components

Type Title Time & Place Hours
practical/laboratory course Embedded MEMS Lab
Einschreibung und Ausgabe der Vorbereitungsunterlagen: 07.06.05, 10-11h CLA J1; Einführungsvorlesungen: 28.06.05, 8-12h ML E13, 29.06.05, 8-12h ML E13; Durchführung des Praktikums: 5 ganze Tage innerhalb 04.-22.07.05: morgendliche Einführung: je 8-10h CLA E4 Die Teilnahme an allen hier aufgeführten Veranstaltungen ist Pflicht.
  • 07.06 Date 10:15-11:00 (CLA J 1)
  • 28.06 Date 08:15-12:00 (ML E 13)
  • 29.06 Date 08:15-12:00 (ML D 13)
  • 29.06 Date 08:15-12:00 (ML E 13)
  • 04.07. - 22.07 Date 08:15-10:00 (CLA E 4)
120 h semesterly

Offered In