Introduction to thin films growth and properties. The nucleation and growth of thin film theory is presented and the obtainable microstructures are illustrated. Main processing and characterization techniques will be discussed.

Oxide films with a thickness of just a few atoms can now be grown with a precision matching that of semiconductors. This opens up a whole world of functional device concepts and fascinating phenomena that would not occur in the expanded bulk crystal.We will give an introduction to thin films deposition techniques and applications with a focus on the growth of multifunctional oxide thin films.