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Thin Films Technology - From Fundamentals to Oxide Electronics
Last Updated: 2026-02-05 16:29:43
Abstract
Oxide films with a thickness of just a few atoms can now be grown with a precision matching that of semiconductors. This opens up a whole world of functional device concepts and fascinating phenomena that would not occur in the expanded bulk crystal.We will give an introduction to thin films deposition techniques and applications with a focus on the growth of multifunctional oxide thin films.
Objective
In this course students will obtain an overarching view on thin film deposition techniques with a focus on epitaxial deposition processes. The main learning objectives are: - Identification of most relevant deposition technique for a given application. - Understanding of growth mechanism and growth modes. - Understanding strategies for engineering the functionalities of the films using the deposition process. - Selection of the most appropriate characterization technique. - Understanding device concepts and fundamental limits in the technology relevant ultra-thin limit. - Assessing the relevance of scientific literature dealing with complex oxide thin films.
Content
A lab visit visit will be organized and students will participate to the design of thin films with atomic precision. General description of the leading deposition routes including physical and chemical vapor deposition techniques (PVD and CVD) as well as so called "wet techniques" (e.g. spin coating and spray pyrolysis). Growth modes and processes. Part of the course discusses vacuum technologies. Fundamental characterization techniques for application-relevant thin films as well as state of the art approaches for in situ and ex-situ determination of the structural, chemical and ferroic (ferromagnetic and ferroelectric) properties of films: (XRD for thin films, RHEED, EDX, scanning probe microscopy techniques, laser-optical characterization and many more) Epitaxy for the advanced design and characterization of high quality thin films for energy efficient oxide electronics. Types of ferroic order, multiferroics, mulitfiunctional oxide materials, epitaxial strain related effects, oxide thin film based devices and examples. Regular discussions on preselected scientific literature and mini-seminars will be organized.
General Information
- Language
- English
- Levels
- DR , MSC
- Frequency
- Yearly recurring
Examination
- Type
- end-of-semester examination
- Mode
- written 90 minutes
- Aids
- None
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| lecture with exercise | Thin Films Technology - From Fundamentals to Oxide Electronics |
|
4 h weekly |
Offered In
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Track: Electronics and Photonics (The core courses and specialisation courses below are a selection for students who wish to specialise in the area of "Electronics and Photonics", see . The individual study plan is subject to the tutor's approval.)
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Specialisation Courses (These specialisation courses are particularly recommended for the area of "Electronics and Photonics", but you are free to choose courses from any other field in agreement with your tutor. A minimum of 40 credits must be obtained from specialisation courses during the Master's Programme.)
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General Electives (Students may choose General Electives from the entire course programme of ETH Zurich - with the following restrictions: courses that belong to the first or second year of a Bachelor curriculum at ETH Zurich as well as courses from GESS "Science in Perspective" are not eligible here. The following courses are explicitly recommended to physics students by their lecturers. (Courses in this list may be assigned to the category "General Electives" directly in myStudies. For the category assignment of other eligible courses keep the choice "no category" and take contact with the Study Administration ( ) after having received the credits.))
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Doctorate Information Technology and Electrical Engineering (A minimum of 12 ECTS credit points must be obtained during doctoral studies (also see sub-categories for details) More Information at )
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Subject Specialisation (The courses on offer below are only a small selection out of a much larger available number of courses. Please discuss your course selection with your PhD supervisor.)
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Doctorate Materials Science (Further information at: )
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