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Thin Films Technology - From Fundamentals to Oxide Electronics
Last Updated: 2026-02-05 16:16:31
Abstract
We will give an introduction to thin films deposition techniques and applications with a focus on the growth of multifunctional oxide thin films. The leading deposition routes (PVD and CVD techniques) and characterization techniques for application-relevant thin films will be discussed. Emerging oxide electronics, materials selection and energy efficient device concepts will be introduced.
Objective
Oxide films with a thickness of just a few atoms can now be grown with a precision matching that of semiconductors. This opens up a whole world of functional device concepts and fascinating phenomena that would not occur in the expanded bulk crystal. Particularly interesting phenomena occur in films showing magnetic or electric order or, even better, both of these ("multiferroics"). In this course students will obtain an overarching view on thin film deposition techniques with a focus on epitaxial deposition processes. We will show how the thin film functionalities of the films can be engineering by the deposition process and present the state of the art for advanced characterization in the technology relevant ultra-thin limit. Students will therefore understand how to fabricate and characterize highly oriented films with magnetic and electric properties not found in nature.
Content
General description of the leading deposition routes including physical and chemical vapor deposition techniques (PVD and CVD) as well as so called "wet techniques" (e.g. spin coating and spray pyrolysis). Growth modes and processes. Part of the course discusses vacuum technologies. Fundamental characterization techniques for application-relevant thin films as well as state of the art approaches for in situ and ex-situ determination of the structural, chemical and ferroic (ferromagnetic and ferroelectric) properties of films: (XRD for thin films, RHEED, EDX, scanning probe microscopy techniques, laser-optical characterization and many more) Epitaxy for the advanced design and characterization of high quality thin films for energy efficient oxide electronics. Types of ferroic order, multiferroics, mulitfiunctional oxide materials, epitaxial strain related effects, oxide thin film based devices and examples.
General Information
- Language
- English
- Levels
- DR , MSC
- Frequency
- Yearly recurring
Examination
- Type
- end-of-semester examination
- Mode
- written 90 minutes
- Aids
- None
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| lecture with exercise | Thin Films Technology - From Fundamentals to Oxide Electronics |
|
4 h weekly |
Offered In
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Track: Electronics and Photonics (The core courses and specialisation courses below are a selection for students who wish to specialise in the area of "Electronics and Photonics", see . The individual study plan is subject to the tutor's approval.)
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Specialisation Courses (These specialisation courses are particularly recommended for the area of "Electronics and Photonics", but you are free to choose courses from any other field in agreement with your tutor. A minimum of 40 credits must be obtained from specialisation courses during the Master's Programme.)
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General Electives (Students may choose General Electives from the entire course programme of ETH Zurich - with the following restrictions: courses that belong to the first or second year of a Bachelor curriculum at ETH Zurich as well as courses from GESS "Science in Perspective" are not eligible here. The following courses are explicitly recommended to physics students by their lecturers. (Courses in this list may be assigned to the category "General Electives" directly in myStudies. For the category assignment of other eligible courses keep the choice "no category" and take contact with the Study Administration ( ) after having received the credits.))
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Doctorate Information Technology and Electrical Engineering (More Information at: )
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Subject Specialisation (A minimum of 12 ECTS credit points must be obtained during doctoral studies. The courses on offer below are only a small selection out of a much larger available number of courses. Please discuss your course selection with your PhD supervisor.)
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Doctorate Materials Science (Further information at: )
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