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402-0315-00L 6 Credits BSC , DS D-MATH , D-PHYS
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Thin Films: Production, Characterization, and Applications I

Dünne Schichten: Herstellung, Charakterisierung und Anwendungen I

Lecturers & Examiners: PD Dr. Hans Zogg
VVZ CR n/a

Last Updated: 2026-02-05 15:06:26

Abstract

Basic properties, growth and applications of thin single crystal (epitaxial), polycrystalline and amorphous layers on various substrates. Content: -Vacuum, evaporation, condensation, deposition (epitaxy) from gas or liquid phase, compound semiconductors, heteroepitaxy, mechanical stresses and dynamics of dislocations;homepage:www.tfp.ethz.ch

Objective

Physikalisches Verständnis und Kenntnis der wichtigsten Methoden des Gebietes. Speziell für experimentelle Physiker geeignet.

Content

Basic properties, growth and applications of thin single crystal (epitaxial), polycrystalline and amorphous layers on various substrates. Content: -Vacuum, evaporation, condensation, deposition (epitaxy) from gas or liquid phase, compound semiconductors, heteroepitaxy, mechanical stresses and dynamics of dislocations; Structural characterization: RBS, surface analyses, optical methods, applications in electronic devices and sensors. homepage: www.tfp.ethz.ch

Resources

Lecture Notes

wird jeweils kapitelweise verteilt

General Information

Language
German
Levels
BSC , DS
Frequency
Yearly recurring

Examination

Type
session examination
Mode
oral 30 minutes

Course Components

Type Title Time & Place Hours
lecture Dünne Schichten: Herstellung, Charakterisierung und Anwendungen I
  • Thu 14:45-16:30 (HPP H 1)
2 h weekly
exercise Dünne Schichten: Herstellung, Charakterisierung und Anwendungen I
  • Thu 16:45-17:30 (HPP H 1)
1 h weekly

Offered In