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151-0956-00L 4 Credits

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Plasma Fundamentals for Material Processing

Lecturers & Examiners: Prof. em. Dr. Philipp Rudolf von Rohr, Dr. Axel Sonnenfeld

VVZ CR n/a

Last Updated: 2026-02-05 15:10:22

Abstract

The course gives an introduction to the basic phenomena of the plasma state and is focussed on such properties of non-thermal electric discharge plasmas, so-called technical plasmas, which are applied for material processing. Especially for surface treatment, plasma-chemical interpretation as well as present and future applications are introduced throughout the course.

Objective

Introduction to the fundamental phenomena and basic principles of non-thermal plasmas used in material processing

Content

The following main subjects will be covered: - Introduction to properties and applications of plasmas - Specification of non-thernal plasma properties - Basic rules of particle interaction in electrical discharges - Deposition and upper-surface layer treatment: principles and examples - Plasma and material diagnostics

Resources

Lecture Notes

no script

Literature

1. Einführung in die Gaselektronik, Wiesemann K.; Stuttgart : Teubner, 1976. (Studienbücher. Physik) 2. Der elektrische Strom im Gas, Granowski W. L.; Berlin : Akademie-Verlag, 1955 3. Plasmatechnik; Janzen, G.; Reihe: Technische Physik; HüthigBuch Verlag Heidelberg 1992. 4. Elementare Plasmaphysik, Arzimowitsch L. A.; Herg. H. Hess, Akademie Verlag, Berlin 1972, 5. Principles of Plasma Dischargesand Materials Processing, LiebermanM.A., Lichtenberg A.J.; John Wiley 1994. 6. Glowdischarge processes, Chapman B., John Wiley 1980. 7. Industrial Plasma Engineering, Vol. 1-2, J. ReeceRoth, IoP1995 -2000. 8. Plasma Polymerization Processes, Biedermann H., Osada Y. Plasmatechnology (3), Elsevier, Amsterdam 1992. 9. Plasma Polymerization, Yasuda H., Academic Press, Inc. Orlando 1985.

General Information

Language: English
Frequency: Yearly recurring

Examination

Type: session examination
Mode: oral 30 minutes

Course Components

Type	Title	Time & Place	Hours
lecture	Plasma Fundamentals for Material Processing	Tue 08:15-10:00 (ML F 34)	2 h weekly
seminar	Plasma Fundamentals for Material Processing	Tue 13:15-14:00 (ML H 41.1)	1 h weekly