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Abstract
The introductory course on Focused Ion Beam (FIB) provides theoretical and hands-on learning for new operators, utilizing lectures, demonstrations and hands-on sessions.
Objective
- Set-up, align and operate a FIB-SEM successfully and safely. - Accomplish operation tasks and optimize microscope performances. - Perform sample preparation (TEM lamella, APT probe…) using FIB-SEM. - Perform other FIB techniques, such as characterization - At the end of the course, students will know how to set-up FIB-SEM, how to prepare TEM lamella/APT probe and how to utilize FIB techniques.
Content
This course provides FIB techniques to students with previous SEM experience. - Overview of FIB theory, instrumentation, operation and applications. - Introduction and discussion on FIB and instrumentation. - Lectures on FIB theory. - Lectures on FIB applications. - Practicals on FIB-SEM set-up, cross-beam alignment. - Practicals on site-specific cross-section and TEM lamellar preparation. - Lecture and demonstration on FIB automation.
Resources
Literature
- Detailed course manual. - Giannuzzi, Stevie: Introduction to focused ion beams instrumentation, theory, techniques, and practice, Springer, 2005. - Orloff, Utlaut, Swanson: High resolution focused ion beams: FIB and its applications, Kluwer Academic/Plenum Publishers, 2003.