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151-0621-00L 6 Credits BSC , DR , MSC D-MAVT , D-PHYS , D-ITET , D-MATL , D-HEST

Microsystems I: Process Technology and Integration

Lecturers & Examiners: Prof. Dr. Christofer Hierold, Dr. Miroslav Haluska

VVZ CR 4.4

Last Updated: 2026-06-03 00:07:31

Abstract

Students are introduced to the fundamentals of semiconductors, the basics of micromachining and silicon process technology and will learn about the fabrication of microsystems and -devices by a sequence of defined processing steps (process flow).

Objective

Students are introduced to the basics of micromachining and silicon process technology and will understand the fabrication of microsystem devices by the combination of unit process steps ( = process flow).

Content

- Introduction to microsystems technology (MST) and micro electro mechanical systems (MEMS) - Basic silicon technologies: Thermal oxidation, photolithography and etching, diffusion and ion implantation, thin film deposition. - Specific microsystems technologies: Bulk and surface micromachining, dry and wet etching, isotropic and anisotropic etching, beam and membrane formation, wafer bonding, thin film mechanical properties. Application of selected technologies will be demonstrated on case studies.

Resources

Lecture Notes

Handouts (available online)

Literature

- S.M. Sze: Semiconductor Devices, Physics and Technology - W. Menz, J. Mohr, O.Paul: Microsystem Technology - Hong Xiao: Introduction to Semiconductor Manufacturing Technology - M. J. Madou: Fundamentals of Microfabrication and Nanotechnology, 3rd ed. - T. M. Adams, R. A. Layton: Introductory MEMS, Fabrication and Applications

General Information

Language: English
Levels: BSC , DR , MSC
Frequency: Yearly recurring

Examination

Type: end-of-semester examination
Mode: oral 20 minutes

Students registered for Microsystems I: Process Technology and Integration (151-0621-00) (MS I) course can voluntary participate in an interim examination which would count only as a bonus to the final grade of the MSI oral examination. This interim exam is written and graded and will contain assignments/problems from the selected parts of MSI lectures and tutorials presented until the day of the examination. Obtaining 80-100% of points at the interim exam improves the student’s grade at the final oral exam by max. 0.25 grades. The maximum grade (6.0) can also be achieved exclusively by the oral exam performance itself without resorting to the bonus from the interim exam. The interim exam will take 1 hour. The date and time of the interim exam will be noticed to students by the lecturer. No auxiliary means are allowed. Any behavior during the exam which violates the ETH ethical codex will result in both the loss of bonus points but also the application of standard disciplinary measures. The material tested in the oral exam (and in the optional interim exam) is fully covered by the lectures and tutorials of the respective semester, as well as the online distributed handouts of the lectures and tutorials (presentation slides in pdf format). The recommended additional books or articles, as well as videos or lecture recordings, are only intended to deepen the understanding of the subject matter.

Course Components

Type	Title	Time & Place	Hours
lecture	Microsystems I: Process Technology and Integration The lecture starts in the first week of the semester.	No time listed	3 h weekly
exercise	Microsystems I: Process Technology and Integration The exercise starts in the second week of the semester.	No time listed	2 h weekly

Offered In

Mechanical Engineering Bachelor
- Bachelor Studies (Programme Regulations 2022)
  - Focus Specialization
    - Micro- and Nanosystems Technology (Focus Coordinator: Prof. Romain Quidant)
    - Engineering for Health (Focus Coordinator: Prof. Bradley Nelson)
Physics Bachelor
- Electives
Electrical Engineering and Information Technology Bachelor
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  - Engineering Electives
Mechanical Engineering Master
- Core Courses (The Core Courses in the Master’s program Mechanical Engineering listed below are indicative and include courses designed by the Department at the Master's level. With the approval of the tutor, students may also select Master's-level courses offered by other departments at ETH. These courses will be marked as non-regular in the LAG, but their categorization as Core Courses is possible if included in the approved LAG.)
Biomedical Engineering Master
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  - Bioelectronics
    - Track Core Courses (During the Master programme, a minimum of 12 CP must be obtained from track core courses.)
Micro- and Nanosystems Master
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  - Elective Core Courses
Electrical Engineering and Information Technology Master
- 01 - Courses of specializations
  - Track: Electronics and Photonics (The core courses and specialisation courses below are a selection for students who wish to specialise in the area of "Electronics and Photonics", see . The individual study plan is subject to the tutor's approval.)
    - Specialisation Courses (These specialisation courses are particularly recommended for the area of "Electronics and Photonics", but you are free to choose courses from any other field in agreement with your tutor. Semester / Research Projects are not allowed in this category. A minimum of 40 credits must be obtained from specialisation courses during the Master's Programme.)
Physics Master
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  - General Electives (Students may choose General Electives from the entire course programme of ETH Zurich - with the following restrictions: courses that belong to the first or second year of a Bachelor curriculum at ETH Zurich as well as courses from GESS "Science in Perspective" are not eligible here. The following courses are explicitly recommended to physics students by their lecturers. (Courses in this list may be assigned to the category "General Electives" directly in myStudies. For the category assignment of other eligible courses keep the choice "no category" and take contact with the Study Administration ( ) after having received the credits.))
Doctorate Materials Science (Further information at: )
- Subject Specialisation
  - Science & Technology of the Small (MaP Doctoral School)