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Microsystems II: Devices and Applications
Last Updated: 2026-06-03 00:14:06
Abstract
The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS). They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
Objective
The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products. During the weekly 3 hour module on Mondays dedicated to Übungen the students will learn the basics of Comsol Multiphysics and utilize this software to simulate MEMS devices to understand their operation more deeply and optimize their designs.
Content
Transducer fundamentals and test structures Pressure sensors and accelerometers Resonators and gyroscopes RF MEMS Acoustic transducers and energy harvesters Thermal transducers and energy harvesters Optical and magnetic transducers Chemical sensors and biosensors, microfluidics and bioMEMS Nanosystem concepts Basic electronic circuits for sensors and microsystems
General Information
- Language
- English
- Levels
- BSC , DR , MSC , NDS
- Frequency
- Yearly recurring
Examination
- Type
- session examination
- Mode
- oral 20 minutes
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| lecture | Microsystems II: Devices and Applications |
|
3 h weekly |
| exercise |
Microsystems II: Devices and Applications
The course starts in the second week of the Semester.
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3 h weekly |
Offered In
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Micro- and Nanosystems Technology (Focus Coordinator: Prof. Romain Quidant)
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Core Courses (The Core Courses in the Master’s program Mechanical Engineering listed below are indicative and include courses designed by the Department at the Master's level. With the approval of the tutor, students may also select Master's-level courses offered by other departments at ETH. These courses will be marked as non-regular in the LAG, but their categorization as Core Courses is possible if included in the approved LAG.)
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Biomedical Engineering Master (Only courses offered under "GESS Science in Perspective" count in this category. See "Offered in" tab in course view. For more information, please refer to )
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Recommended Elective Courses (These courses are particularly recommended for the Bioelectronics track. Please consult your track adviser if you wish to select other subjects.)
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Track: Electronics and Photonics (The core courses and specialization courses below are a selection for students who wish to specialize in the area of "Electronics and Photonics", see . The individual study plan is subject to the tutor's approval.)
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Specialization Courses (These specialization courses are particularly recommended for the area of "Electronics and Photonics", but you are free to choose courses from any other field in agreement with your tutor. Semester / Research Projects are not allowed in this category. A minimum of 40 credits must be obtained from specialization courses during the Master's Programme.)
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Doctorate Materials Science (Further information at: )
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