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Microscopy Training SEM I - Introduction to SEM
Last Updated: 2026-06-01 11:30:57
Abstract
This introductory course on Scanning Electron Microscopy (SEM) emphasizes hands-on learning. Using ScopeM SEMs, students have the opportunity to study their own samples (or samples provided) and solve practical problems by applying knowledge acquired during the lectures. At the end of the course, students will be able to apply SEM for their (future) research projects.
Objective
- Set-up, align and operate a SEM successfully and safely. - Understand important operational parameters of SEM and optimize microscope performance. - Explain different signals in SEM and obtain secondary electron (SE) and backscatter electron (BSE) images. - Operate the SEM in low-vacuum mode. - Make use of EDX for semi-quantitative elemental analysis. - Prepare samples with different techniques and equipment for imaging and analysis by SEM.
Content
During the course, students learn through lectures, demonstrations, and hands-on sessions how to setup and operate SEM instruments, including low-vacuum and low-voltage applications. This course gives basic skills for students new to SEM. At the end of the course, students are able to align an SEM, to obtain secondary electron (SE) and backscatter electron (BSE) images and to perform energy dispersive X-ray spectroscopy (EDX) semi-quantitative analysis. Emphasis is put on procedures to optimize SEM parameters in order to best solve practical problems and deal with a wide range of materials. Lectures: - Introduction on Electron Microscopy and instrumentation - electron sources, electron lenses and probe formation - beam/specimen interaction, image formation, image contrast and imaging modes. - sample preparation techniques for EM - X-ray micro-analysis (theory and detection), qualitative and semi-quantitative EDX and point analysis, linescan and spectral mapping Practicals: - Brief description and demonstration of the SEM microscope - Practice on image formation, image contrast (and image processing) - Student participation on sample preparation techniques - Scanning Electron Microscopy lab exercises: setup and operate the instrument under various imaging modalities - Practice on real-world samples and report results
Resources
Lecture Notes
Lecture notes will be distributed.
Literature
- Peter Goodhew, John Humphreys, Richard Beanland: Electron Microscopy and Analysis, 3rd ed., CRC Press, 2000 - Joseph Goldstein, et al, Scanning Electron Microscopy and X-Ray Microanalysis, 4th ed, Srpinger US, 2018 - Egerton: Physical Principles of Electron Microscopy: an introduction to TEM, SEM and AEM, Springer Verlag, 2007
General Information
- Language
- English
- Levels
- DR , MSC
- Frequency
- Semesterly recurring
Examination
- Type
- ungraded semester performance
Registration & Places
- Signup End
- 20.10.2025
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| practical/laboratory course |
Microscopy Training SEM I - Introduction to SEM
This block course will take place during 5 full days 3-7 November 2025. Lectures will be held in the seminar room, practical exercises in rooms of ScopeM.
There will be no repetition of this course, but it's offered every semester.
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35 h semesterly |
Offered In
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Wahlfächer (Den Studierenden steht das gesamte Lehrangebot der ETH Zürich auf Master-Stufe zur Auswahl offen. Bitte wenden Sie sich bei Unklarheiten ans Studiensekretariat.)
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Allgemeine Wahlfächer (Den Studierenden steht das gesamte Lehrangebot der ETH Zürich zur individuellen Auswahl offen - mit folgenden Einschränkungen: Lehrveranstaltungen aus den ersten beiden Studienjahren eines Bachelor-Curriculums der ETH Zürich sowie Lehrveranstaltungen aus GESS "Wissenschaft im Kontext" sind nicht als allgemeines Wahlfach anrechenbar. Die Dozierenden folgender Lehrveranstaltungen empfehlen sie ausdrücklich den Studierenden der Physik. (Für die Lehrveranstaltungen in dieser Liste können Sie die Kategorie "Allgemeine Wahlfächer" direkt in myStudies zuordnen. Für die Kategoriezuordnung anderer zugelassener Lehrveranstaltungen lassen Sie bei der Prüfungsanmeldung "keine Kategorie" ausgewählt und wenden Sie sich nach dem Verfügen des Prüfungsresultates an das Studiensekretariat ( ).))
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Doktorat Materialwissenschaft (Weitere Informationen unter: )
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