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402-0317-00L 6 Credits DR , MSC D-ITET , D-PHYS , D-MATL
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Semiconductor Materials: Fundamentals and Fabrication

Lecturers & Examiners: Prof. em. Dr. Werner Wegscheider, PD Dr. Silke Schön
VVZ CR n/a

Last Updated: 2026-06-01 11:30:58

Abstract

This course gives an introduction into the fundamentals of semiconductor materials. The main focus is on state-of-the-art fabrication and characterization methods. The course will be continued in the spring term with a focus on applications.

Objective

Basic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing

Content

1. Fundamentals of Solid State Physics 1.1 Semiconductor materials 1.2 Band structures 1.3 Carrier statistics in intrinsic and doped semiconductors 1.4 p-n junctions 1.5 Low-dimensional structures 2. Bulk Material growth of Semiconductors 2.1 Czochalski method 2.2 Floating zone method 2.3 High pressure synthesis 3. Semiconductor Epitaxy 3.1 Fundamentals of Epitaxy 3.2 Molecular Beam Epitaxy (MBE) 3.3 Metal-Organic Chemical Vapor Deposition (MOCVD) 3.4 Liquid Phase Epitaxy (LPE) 4. In situ characterization 4.1 Pressure and temperature 4.2 Reflectometry 4.3 Ellipsometry and RAS 4.4 LEED, AES, XPS 4.5 STM, AFM 5. The invention of the transistor - Christmas lecture

Resources

Lecture Notes

https://moodle-app2.let.ethz.ch/course/view.php?id=26133

General Information

Language
English
Levels
DR , MSC
Frequency
Yearly recurring

Examination

Type
session examination
Mode
oral 25 minutes
Each student is required to give a short presentation on a selected topic during the exercises (compulsory continuous performance assessment). The topics focus on the research in the field covered by the lecture. Topics and preparation material will be provided during the lecture. The student’s presentation will not be graded (pass/fail).The effective duration of the exam is 20 minutes.For technical reasons it shows 25min.

Course Components

Type Title Time & Place Hours
lecture Semiconductor Materials: Fundamentals and Fabrication
  • Tue 13:45-15:30 (HCI H 8.1)
2 h weekly
exercise Semiconductor Materials: Fundamentals and Fabrication
  • Tue 15:45-16:30 (HCI H 8.1)
1 h weekly

Offered In