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327-2140-00L 1 Credits DR , MSC D-MATL , D-MAVT
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Focused Ion Beam and Applications

Lecturers & Examiners: Dr. Joakim Reuteler, Dr. Stephan Gerstl, Dr. Anne Greet Bittermann, Dr. Luiz Grafulha Morales, Dr. Peng Zeng
Number of participants limited to 6. PhD students will be asked for a fee.
VVZ CR n/a

Last Updated: 2026-06-01 11:33:18

Abstract

The introductory course on Focused Ion Beam (FIB) provides theoretical and hands-on learning for new operators, utilizing lectures, demonstrations and hands-on sessions.

Objective

- Set-up, align and operate a FIB-SEM successfully and safely. - Accomplish operation tasks and optimize microscope performances. - Perform sample preparation (TEM lamella, APT probe…) using FIB-SEM. - Perform other FIB techniques, such as characterization - At the end of the course, students will know how to set-up FIB-SEM, how to prepare TEM lamella/APT probe and how to utilize FIB techniques.

Content

This course provides FIB techniques to students with previous SEM experience. - Overview of FIB theory, instrumentation, operation and applications. - Introduction and discussion on FIB and instrumentation. - Lectures on FIB theory. - Lectures on FIB applications. - Practicals on FIB-SEM set-up, cross-beam alignment. - Practicals on site-specific cross-section and TEM lamellar preparation. - Lecture and demonstration on FIB automation.

Resources

Literature

- Detailed course manual. - Giannuzzi, Stevie: Introduction to focused ion beams instrumentation, theory, techniques, and practice, Springer, 2005. - Orloff, Utlaut, Swanson: High resolution focused ion beams: FIB and its applications, Kluwer Academic/Plenum Publishers, 2003.

General Information

Language
English
Levels
DR , MSC
Frequency
Semesterly recurring

Examination

Type
ungraded semester performance
Student presentation and discussion during course.

Registration & Places

Limited places (Special selection)
Signup End
02.06.2025

Course Components

Type Title Time & Place Hours
practical/laboratory course Focused Ion Beam and Applications
This three-days block course will take place from June 16-18, 2025 in the seminar room and rooms of ScopeM.
  • 16.06 Date 07:45-13:30 (HPZ E 35)
  • 17.06 Date 07:45-13:30 (HPZ E 35)
  • 18.06 Date 13:45-17:30 (HPZ E 35)
21 h semesterly

Offered In