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402-0318-00L 6 Credits DR , MSC D-MATL , D-PHYS , D-ITET
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Semiconductor Materials: Characterization, Processing and Devices

Lecturers & Examiners: Prof. em. Dr. Werner Wegscheider, PD Dr. Silke Schön
VVZ CR n/a

Last Updated: 2026-06-01 11:33:18

Abstract

This course gives an introduction into the fundamentals of semiconductor materials. The main focus in this semester is on state-of-the-art characterization, semiconductor processing and devices.

Objective

Basic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing

Content

1. Material characterization: structural and chemical methods 1.1 X-ray diffraction methods (Powder diffraction, HRXRD, XRR, RSM) 1.2 Electron microscopy Methods (SEM, EDX, TEM, STEM, EELS) 1.3 SIMS, RBS 2. Material characterization: electronic methods 2.1 van der Pauw techniquel 2.2 Hall effect 2.3 Cyclotron resonance spectroscopy 2.4. Quantum Hall effect 3. Material characterization: Optical methods 3.1 Absorption methods 3.2 Photoluminescence methods 3.3 FTIR, Raman spectroscopy 4. Semiconductor processing: lithography 4.1 Optical lithography methods 4.2 Electron beam lithography 4.3 FIB lithography 4.4 Scanning probe lithography 4.5 Direct growth methods (CEO, Nanowires) 5. Semiconductor processing: structuring of layers and devices 5.1 Wet etching methods 5.2 Dry etching methods (RIE, ICP, ion milling) 5.3 Physical vapor depositon methods (thermal, e-beam, sputtering) 5.4 Chemical vapor Deposition methods (PECVD, LPCVD, ALD) 5.5 Cleanroom basics & tour 6. Semiconductor devices 6.1 Semiconductor lasers 6.2 LED & detectors 6.3 Solar cells 6.4 Transistors (FET, HBT, HEMT)

Resources

Lecture Notes

https://moodle-app2.let.ethz.ch/course/view.php?id=24699

General Information

Language
English
Levels
DR , MSC
Frequency
Yearly recurring

Examination

Type
session examination
Mode
oral 25 minutes
Each student is required to give a short presentation on a selected topic during the exercises (compulsory continuous performance assessment). The topics focus on the research in the field covered by the lecture. Topics and preparation material will be provided during the lecture. The student’s presentation will be graded and must be passed on its own (pass/fail). Students who do not pass the assignment are required to de-register from the exam and will otherwise be treated as a no show.The effective duration of the exam is 20 minutes.For technical reasons it shows 25min.

Course Components

Type Title Time & Place Hours
lecture Semiconductor Materials: Characterization, Processing and Devices
  • Tue 11:45-13:30 (HCI H 2.1)
2 h weekly
exercise Semiconductor Materials: Characterization, Processing and Devices
  • Tue 13:45-14:30 (HCI H 2.1)
1 h weekly

Offered In