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Microscopy Training SEM I - Introduction to SEM
Last Updated: 2026-06-01 11:33:18
Abstract
The introductory course on Scanning Electron Microscopy (SEM) emphasizes hands-on learning. Using 2 SEM instruments, students have the opportunity to study their own samples, or standard test samples, as well as solving exercises provided by ScopeM scientists.
Objective
- Set-up, align and operate a SEM successfully and safely. - Accomplish imaging tasks successfully and optimize microscope performances. - Master the operation of a low-vacuum and field-emission SEM and EDX instrument. - Perform sample preparation with corresponding techniques and equipment for imaging and analysis - Acquire techniques in obtaining secondary electron and backscatter electron micrographs - Perform EDX qualitative and semi-quantitative analysis
Content
During the course, students learn through lectures, demonstrations, and hands-on sessions how to setup and operate SEM instruments, including low-vacuum and low-voltage applications. This course gives basic skills for students new to SEM. At the end of the course, students with no prior experience are able to align a SEM, to obtain secondary electron (SE) and backscatter electron (BSE) micrographs and to perform energy dispersive X-ray spectroscopy (EDX) qualitative and semi-quantitative analysis. The procedures to better utilize SEM to solve practical problems and to optimize SEM analysis for a wide range of materials will be emphasized. - Discussion of students' sample/interest - Introduction and discussion on Electron Microscopy and instrumentation - Lectures on electron sources, electron lenses and probe formation - Lectures on beam/specimen interaction, image formation, image contrast and imaging modes. - Lectures on sample preparation techniques for EM - Brief description and demonstration of the SEM microscope - Practice on beam/specimen interaction, image formation, image contrast (and image processing) - Student participation on sample preparation techniques - Scanning Electron Microscopy lab exercises: setup and operate the instrument under various imaging modalities - Lecture and demonstrations on X-ray micro-analysis (theory and detection), qualitative and semi-quantitative EDX and point analysis, linescans and spectral mapping - Practice on real-world samples and report results
Resources
Literature
- Detailed course manual - Williams, Carter: Transmission Electron Microscopy, Plenum Press, 1996 - Hawkes, Valdre: Biophysical Electron Microscopy, Academic Press, 1990 - Egerton: Physical Principles of Electron Microscopy: an introduction to TEM, SEM and AEM, Springer Verlag, 2007
General Information
- Language
- English
- Levels
- DR , MSC
- Frequency
- Semesterly recurring
Examination
- Type
- ungraded semester performance
Registration & Places
- Signup End
- 03.03.2025
Course Components
| Type | Title | Time & Place | Hours |
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| practical/laboratory course |
Microscopy Training SEM I - Introduction to SEM
This block course will take place during 5 full days (9am-5pm) on March 17-21, 2025. Lectures will be held in the seminar room, practical exercises in rooms of ScopeM.
There will be no repetition of this course, but it's offered every semester.
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35 h semesterly |
Offered In
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Wahlfächer (Den Studierenden steht das gesamte Lehrangebot der ETH Zürich auf Master-Stufe zur Auswahl offen. Bitte wenden Sie sich bei Unklarheiten ans Studiensekretariat.)
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Doktorat Materialwissenschaft (Weitere Informationen unter: )
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