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Microtechnology
Last Updated: 2026-02-05 16:29:22
Abstract
Students are introduced to the basics of microtechnology, cleanroom, semiconductor and silicon process technologies. They will get to know the fabrication of mostly silicon-based microdevices and -systems and all related microfabrication processes.
Objective
Students are introduced to the basics of microtechnology, cleanroom, semiconductor and silicon process technologies. They will get to know the different fabrication methods for various microdevices and systems.
Content
Introduction to microtechnology, semiconductors, and micro electro mechanical systems (MEMS) - Fundamentals of semiconductors and band model - Fundamentals of devices: transistor and diode. - Silicon processing and fabrication steps - Silicon crystal structure and manufacturing - Thermal oxidation - Doping via diffusion and ion implantation - Photolithography - Thin film deposition: dielectrics and metals - Wet etching & bulk micromachining - Dry etching & surface micromachining - Microtechnological processing and fabrication sequence - Optional: Packaging
Resources
Lecture Notes
Handouts in English
Literature
- S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002 - R.F. Pierret, "Semiconductor Device Fundamentals", Addison Wesley, 1996 - R. C. Jaeger, "Introduction to Microelectronic Fabrication", Prentice Hall 2002 - S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001 - W. Menz, J. Mohr, O. Paul, "Microsystem Technology", Wiley-VCH, 2001 - G. T. A. Kovacs, "Micromachined Transducers Sourcebook", McGraw-Hill, 1998 - M. J. Madou, "Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002
General Information
- Language
- English
- Levels
- DR , MSC
- Frequency
- Yearly recurring
Examination
- Type
- session examination
- Mode
- oral 20 minutes
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| lecture with exercise |
Microtechnology
This lecture will take place in classroom in BASEL.
Attention: the lecture starts in the second week of the semester.
|
|
3 h weekly |
Offered In
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Doctorate Biosystems Science and Engineering (More Information at: )
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Doctorate Materials Science (Further information at: )
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Advanced Courses (Students need to aquire a minimum of 22 ECTS in this category (MSc Biotechnology Study Programme Regulations 2021). The list of advanced courses is a closed list, no other course can be added to this category.)
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