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402-0317-00L 6 Credits DR , MSC D-MATL , D-PHYS , D-ITET

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Semiconductor Materials: Fundamentals and Fabrication

Lecturers & Examiners: Prof. em. Dr. Werner Wegscheider, PD Dr. Silke Schön

VVZ CR n/a

Last Updated: 2026-02-05 16:30:04

Abstract

This course gives an introduction into the fundamentals of semiconductor materials. The main focus is on state-of-the-art fabrication and characterization methods. The course will be continued in the spring term with a focus on applications.

Objective

Basic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing

Content

1. Fundamentals of Solid State Physics 1.1 Semiconductor materials 1.2 Band structures 1.3 Carrier statistics in intrinsic and doped semiconductors 1.4 p-n junctions 1.5 Low-dimensional structures 2. Bulk Material growth of Semiconductors 2.1 Czochalski method 2.2 Floating zone method 2.3 High pressure synthesis 3. Semiconductor Epitaxy 3.1 Fundamentals of Epitaxy 3.2 Molecular Beam Epitaxy (MBE) 3.3 Metal-Organic Chemical Vapor Deposition (MOCVD) 3.4 Liquid Phase Epitaxy (LPE) 4. In situ characterization 4.1 Pressure and temperature 4.2 Reflectometry 4.3 Ellipsometry and RAS 4.4 LEED, AES, XPS 4.5 STM, AFM 5. The invention of the transistor - Christmas lecture

Resources

Lecture Notes

https://moodle-app2.let.ethz.ch/course/view.php?id=23113

General Information

Language: English
Levels: DR , MSC
Frequency: Yearly recurring

Examination

Type: session examination
Mode: oral 25 minutes

Each student is required to give a short presentation on a selected topic during the exercises (compulsory continuous performance assessment). The topics focus on the research in the field covered by the lecture. Topics and preparation material will be provided during the lecture. The student’s presentation will not be graded (pass/fail).The effective duration of the exam is 20 minutes.For technical reasons it shows 25min.

Course Components

Type	Title	Time & Place	Hours
lecture	Semiconductor Materials: Fundamentals and Fabrication	Tue 13:45-15:30 (HCI D 2)	2 h weekly
exercise	Semiconductor Materials: Fundamentals and Fabrication	Tue 15:45-16:30 (HCI D 2)	1 h weekly

Offered In

Materials Science Master
- Elective Courses (The students are free to choose individually from the entire course offer of ETH Zürich on the Master level. Please consult the study administration in case of questions.)
Physics Master
- Electives
  - Electives: Physics and Mathematics
    - Selection: Solid State Physics
Doctorate Materials Science (Further information at: )
- Subject Specialisation
  - Science & Technology of the Small (MaP Doctoral School)
Doctorate Physics (More Information at: )
- Subject Specialisation (Please note that this is an INCOMPLETE list of courses.)
Quantum Engineering Master
- Electives (This is a selection of courses particularly suitable for the MSc QE. In agreement with the tutor, students may choose other courses from the ETH course catalogue.)