Focused Ion Beam and Applications

Abstract

The course on Focused Ion Beam (FIB) provides theoretical and hands-on learning, applying what is learned in lectures to hands-on sessions.

Objective

 Overview of FIB theory, instrumentation.  FIB hardware operation and applications.  Set-up, align and operate a FIB-SEM successfully and safely.  Accomplish operational tasks (milling and deposition) and optimize microscope parameters.  Perform cross-sections: preparation and analysis  Understanding of workflow for sample preparation (TEM lamella, APT needles, XCT pillars…) using FIB-SEM.  Applying FIB-SEM for materials characterization.

Content

This course provides FIB techniques to students with previous SEM experience. At the end of the course, students will be able to set-up a FIB-SEM session and characterize cross-sections. Students will also understand how to prepare TEM & APT samples and design a FIB experiment to solve research problems.  Introduction to FIB theory and instrumentation.  Discussion of FIB operation and applications.  Lecture and demonstration on FIB automation.  Practicals on FIB-SEM set-up and alignment.  Practicals on cross-section and site-specific sample characterization.  Practicals on sample preparation (TEM lamella/APT needles).

Resources