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327-2125-00L 2 Credits DR , MSC D-HEST , D-MATL , D-PHYS
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Microscopy Training SEM I - Introduction to SEM

The number of participants is limited. In case of overbooking, the course will be repeated once. All registrations will be recorded on the waiting list. For PhD students, postdocs and others, a fee will be charged ( ). All applicants must additionally register on this form: (link will follow) The selected applicants will be contacted and asked for confirmation a few weeks before the course date.
VVZ CR n/a

Last Updated: 2026-02-05 16:02:03

Abstract

This introductory course on Scanning Electron Microscopy (SEM) emphasizes hands-on learning. Using ScopeM SEMs, students have the opportunity to study their own samples (or samples provided) and solve practical problems by applying knowledge acquired during the lectures. At the end of the course, students will be able to apply SEM for their (future) research projects.

Objective

- Set-up, align and operate a SEM successfully and safely. - Understand important operational parameters of SEM and optimize microscope performance. - Explain different signals in SEM and obtain secondary electron (SE) and backscatter electron (BSE) images. - Operate the SEM in low-vacuum mode. - Make use of EDX for semi-quantitative elemental analysis. - Prepare samples with different techniques and equipment for imaging and analysis by SEM.

Content

During the course, students learn through lectures, demonstrations, and hands-on sessions how to setup and operate SEM instruments, including low-vacuum and low-voltage applications. This course gives basic skills for students new to SEM. At the end of the course, students are able to align an SEM, to obtain secondary electron (SE) and backscatter electron (BSE) images and to perform energy dispersive X-ray spectroscopy (EDX) semi-quantitative analysis. Emphasis is put on procedures to optimize SEM parameters in order to best solve practical problems and deal with a wide range of materials. Lectures: - Introduction on Electron Microscopy and instrumentation - electron sources, electron lenses and probe formation - beam/specimen interaction, image formation, image contrast and imaging modes. - sample preparation techniques for EM - X-ray micro-analysis (theory and detection), qualitative and semi-quantitative EDX and point analysis, linescan and spectral mapping Practicals: - Brief description and demonstration of the SEM microscope - Practice on image formation, image contrast (and image processing) - Student participation on sample preparation techniques - Scanning Electron Microscopy lab exercises: setup and operate the instrument under various imaging modalities - Practice on real-world samples and report results

Resources

Lecture Notes

Lecture notes will be distributed.

Literature

- Peter Goodhew, John Humphreys, Richard Beanland: Electron Microscopy and Analysis, 3rd ed., CRC Press, 2000 - Joseph Goldstein, et al, Scanning Electron Microscopy and X-Ray Microanalysis, 4th ed, Srpinger US, 2018 - Egerton: Physical Principles of Electron Microscopy: an introduction to TEM, SEM and AEM, Springer Verlag, 2007

General Information

Language
English
Levels
DR , MSC
Frequency
Semesterly recurring

Examination

Type
ungraded semester performance
Oral presentation and discussion of the data obtained during the course.

Registration & Places

Limited places (Special selection)
Signup End
19.09.2022

Course Components

Type Title Time & Place Hours
practical/laboratory course Microscopy Training SEM I - Introduction to SEM
This block course will take place during 5 full days October 3-7, 2022. Lectures will be held in the seminar room, practical exercises in rooms of ScopeM. The repetition of this course will take place in January/February 2023 (if needed).
  • 03.10. - 05.10 Date 07:45-13:30 (HIT F 11.1)
  • 07.10 Date 11:45-15:30 (HIT F 11.1)
35 h semesterly

Offered In