Analytical Electron Microscopy: EDS

Abstract

The main goal of this hands-on course is to provide students withfundamental understanding of underlying physical processes, experimental set-up solutions and hands-on practical experience of analytical electron microscopy (AEM) technique for microstructure characterisation, specifically Energy Dispersive X-ray Spectroscopy (EDS) and spectrum imaging (SI) technique.

Objective

- understanding of physical processes that enable the EDS technique and data evaluation algorithms; - hand-on experience of data acquisition and evaluation routines including - practical understanding of different data acquisition set-ups, - optimization of acquisition parameters for most reliable quantification of the results, - the knowledge of the available and most reliable quantification algorithms and their handling - the knowledge of data evaluation routines and possible handicaps for reliable elemental content distribution analyses and material composition quantification - the effect of the specimen geometry on the data and experimental solutions for minimization of the artefacts

Content

This advanced course provides analytical EM techniques to the students with prior EM experience (TEM or SEM). At the end of the course, students will understand the physical processes that enable the EDS technique and data evaluation algorithms and apply the technique for their own research. - Introduction to analytical electron microscopy: theory and instrumentation. - Lectures on EDS, WDS - Practical on EDS-SEM: data acquisition and analysis. - Practical on EDS-TEM: data acquisition and analysis. The hand-on trainings are to be carried-out on a real-life specimen, provided by lecturers and / by students.

Resources