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Micro- and Nanosystems
Mikro- und Nanosysteme
Last Updated: 2026-02-05 14:55:18
Abstract
The students are introduced to the basics and principles of microelectronic devices as well as micro- and nano systems. They will be able to apply this knowledge for system development and to assess and apply the principles, concepts and methods from various technical and scientific disciplines.
Objective
The students are introduced to the basics and principles of microelectronic devices as well as micro- and nano systems. They will be able to apply this knowledge for system development and to assess and apply the principles, concepts and methods from various technical and scientific disciplines.
Content
- Introduction into the physics and principles of semiconductor devices (energy band model, diode, BJT, MOSFET, CMOS, photodiode) - Sensor basics: resolution, relative and absolute precision, noise, linearity, frequency response, temperature dependence - Miniaturized transducers (actuators and sensors) for magnetical, optical and chemical measurements - Microfluidic systems: fluid flow, device fabrication, valves, pumps, microchemical analysis systems - BioMEMS: biosensors, sensors in nature (from cell membrane to neurons, smelling, seeing, hearing), neuron-IC interfacing - Modern electronic circuits for microsystems - Microstructures and materials: mechanical material properties, reliability - Nanosystems: overview over current topics of research
Resources
Lecture Notes
HandoutG. Kovacs: Micromachined Transducer Sourcebook
General Information
- Language
- German
- Frequency
- Yearly recurring
Examination
- Type
- session examination
- Mode
- oral 30 minutes
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| lecture | Mikro- und Nanosysteme |
|
2 h weekly |
| exercise | Mikro- und Nanosysteme |
|
1 h weekly |