VVZ API is not affiliated with ETH Zurich. Data might be outdated or incorrect. Please view the official ETHZ Vorlesungsverzeichnis for binding information.
Microsensors and Microsystems
Last Updated: 2026-02-05 16:07:58
Abstract
Students are introduced to microsensor and microsystem technology, the different materials and associated micromachining and fabrication techniques. They become acquainted with fundamentals of different transducers and their applications.
Objective
Students are introduced to microsensor and microsystem technology. The students will get to know the different materials (silicon, glass, plastics) and the respective micromachining and fabrication techniques. They will become acquainted with the fundamentals of the different transducers including mechanical, thermal, magnetic, chemical, optical, and biosensors. They also will get to know strategies to integrate components into microsystems.
Content
Introduction to microensors and microsystems # Brief introduction to semiconductors # Silicon and glass micromachining # Plastic materials and their micromachining # Fundamentals of different transducers # Mechanical sensors # Thermal sensors # Magnetic sensors # Optical devices # Chemical and biosensors # Microfluidics # BioMEMS
Resources
Lecture Notes
Handouts in English
Literature
- S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002 - W. Menz, J. Mohr, O. Paul, “Microsystem Technology”, Wiley-VCH, 2001 - G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998 - M. J. Madou, “Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002 - S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001
General Information
- Language
- English
- Levels
- DR , MSC
- Frequency
- Every two years
Examination
- Type
- session examination
- Mode
- oral 20 minutes
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| lecture with exercise |
Microsensors and Microsystems
Lecture takes place in classroom in Basel.
|
|
3 h weekly |
Offered In
-
-
Advanced Courses (Students need to aquire a total of 24 ECTS in this category. The list of advanced courses is a closed list, no other course can be added to this category.)
-
-
Doctorate Biosystems Science and Engineering (More Information at: )
-
Subject Specialisation (The courses on offer below are a selection out of a much larger available number of courses. You may look for other courses too. If you are uncertain about the creditability and assessment of the course unit you wish to take, please consult the D-BSSE Doctoral Administration. This should be done before registering the course unit.)
-