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636-0114-00L 4 Credits MSC D-BSSE
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Microsensors and Microsystems

Lecturers & Examiners: Prof. Dr. Andreas Hierlemann
Does not take place this semester. Attention: This course was offered in previous semesters with the number: 636-0004-00 "Microsensors and Microsystems". Students that already passed course 636-0004-00 cannot receive credits for course 636-0114-00. Prerequisites: Physics I and Physics II highly recommended. This class builds on the contents of course 636-0103-00L, "Microtechnology", which are assumed to be known
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Last Updated: 2026-02-05 15:53:46

Abstract

Students are introduced to microsensor and microsystem technology, the different materials and associated micromachining and fabrication techniques. They become acquainted with fundamentals of different transducers and their applications.

Objective

Students are introduced to microsensor and microsystem technology. The students will get to know the different materials (silicon, glass, plastics) and the respective micromachining and fabrication techniques. They will become acquainted with the fundamentals of the different transducers including mechanical, thermal, magnetic, chemical, optical, and biosensors. They also will get to know strategies to integrate components into microsystems.

Content

Introduction to microensors and microsystems # Brief introduction to semiconductors # Silicon and glass micromachining # Plastic materials and their micromachining # Fundamentals of different transducers # Mechanical sensors # Thermal sensors # Magnetic sensors # Optical devices # Chemical and biosensors # Microfluidics # BioMEMS

Resources

Lecture Notes

Handouts in English

Literature

- S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002 - W. Menz, J. Mohr, O. Paul, “Microsystem Technology”, Wiley-VCH, 2001 - G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998 - M. J. Madou, “Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002 - S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001

General Information

Language
English
Levels
MSC
Frequency
Every two years

Examination

Type
session examination
Mode
oral 20 minutes
The exam can be hold in English or German. The performance assessment can be examined every session. Repetition possible without re-enrolling for the course unit.

Course Components

Type Title Time & Place Hours
lecture with exercise Microsensors and Microsystems
Does not take place this semester. This course will not take place in spring semester 2021, but will be offered again in spring semester 2022.
No time listed 3 h weekly

Offered In