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Microsystems II: Devices and Applications
Last Updated: 2026-02-05 15:55:09
Abstract
The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS). They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
Objective
The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products. During the weekly 3 hour module on Mondays dedicated to Übungen the students will learn the basics of Comsol Multiphysics and utilize this software to simulate MEMS devices to understand their operation more deeply and optimize their designs.
Content
Transducer fundamentals and test structures Pressure sensors and accelerometers Resonators and gyroscopes RF MEMS Acoustic transducers and energy harvesters Thermal transducers and energy harvesters Optical and magnetic transducers Chemical sensors and biosensors, microfluidics and bioMEMS Nanosystem concepts Basic electronic circuits for sensors and microsystems
General Information
- Language
- English
- Levels
- BSC , MSC , NDS
- Frequency
- Yearly recurring
Examination
- Type
- session examination
- Mode
- oral 20 minutes
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| lecture |
Microsystems II: Devices and Applications
Due to the current situation, the course will be held online in Zoom until further notice.
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3 h weekly |
| exercise |
Microsystems II: Devices and Applications
The course starts in the second week of the Semester. Due to the current situation, the course will be held online in Zoom until further notice.
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|
3 h weekly |
Offered In
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Microsystems and Nanoscale Engineering (Focus Coordinator: Prof. Christofer Hierold)
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Micro & Nanosystems (The courses listed in this category “Core Courses” are recommended. Alternative courses can be chosen in agreement with the tutor.)
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Recommended Elective Courses (These courses are particularly recommended for the Bioelectronics track. Please consult your track adviser if you wish to select other subjects.)
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Electronics and Photonics (The core courses and specialization courses below are a selection for students who wish to specialize in the area of "Electronics and Photonics", see . The individual study plan is subject to the tutor's approval.)
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Specialization Courses (These specialization courses are particularly recommended for the area of "Electronics and Photonics", but you are free to choose courses from any other field in agreement with your tutor. A minimum of 40 credits must be obtained from specialization courses during the Master's Programme.)
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Major Courses (A total of 42 CP must be achieved form courses during the Master Program. The individual study plan is subject to the tutor's approval.)
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Recommended Subjects (These courses are recommended, but you are free to choose courses from any other special field. Please consult your tutor.)
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