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227-0148-00L 6 Credits BSC , MSC D-ITET , D-MATH , D-PHYS
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VLSI III: Test and Fabrication of VLSI Circuits

Lecturers: Prof. Dr. Luca Benini
Examiners: Frank Kagan Gürkaynak, Prof. Dr. Luca Benini
Does not take place this semester.
VVZ CR n/a

Last Updated: 2026-02-05 15:47:54

Abstract

In this course, we will cover how modern microchips are fabricated, and we will focus on methods and tools to uncover fabrication defects, if any, in these microchips. As part of the exercises, students will get to work on an industrial 1 million dollar automated test equipment.

Objective

Learn about modern IC manufacturing methodologies, understand the problem of IC testing. Cover the basic methods, algorithms and techniques to test circuits in an efficient way. Learn about practical aspects of IC testing and apply what you learn in class using a state-of-the art tester.

Content

In this course we will deal with modern integrated circuit (IC) manufacturing technology and cover topics such as: - Today's nanometer CMOS fabrication processes (HKMG). - Optical and post optical Photolithography. - Potential alternatives to CMOS technology and MOSFET devices. - Evolution paths for design methodology. - Industrial roadmaps for the future evolution of semiconductor technology (ITRS). If you want to earn money by selling ICs, you will have to deliver a product that will function properly with a very large probability. The main emphasis of the lecture will be discussing how this can be achieved. We will discuss fault models and practical techniques to improve testability of VLSI circuits. At the IIS we have a state-of-the-art automated test equipment (Advantest SoC V93000) that we will make available for in class exercises and projects. At the end of the lecture you will be able to design state-of-the art digital integrated circuits such as to make them testable and to use automatic test equipment (ATE) to carry out the actual testing. During the first weeks of the course there will be weekly practical exercises where you will work in groups of two. For the last 5 weeks of the class students will be able to choose a class project that can be: - The test of their own chip developed during a previous semester thesis - Developing new setups and measurement methods in C++ on the tester - Helping to debug problems encountered in previous microchips by IIS. Half of the oral exam will consist of a short presentation on this class project.

Resources

Lecture Notes

Main course book: "Essentials of Electronic Testing for Digital, Memory and Mixed-Signal VLSI Circuits" by Michael L. Bushnell and Vishwani D. Agrawal, Springer, 2004. This book is available online within ETH throughhttp://link.springer.com/book/10.1007%2Fb117406

Learning Materials (Links)

General Information

Language
English
Levels
BSC , MSC
Frequency
Yearly recurring

Examination

Type
session examination
Mode
oral 30 minutes
Oral examination can also be held in German

Course Components

Type Title Time & Place Hours
lecture with exercise VLSI III: Test and Fabrication of VLSI Circuits
Does not take place this semester. Will be offered in spring 2022 as "227-0148-00L VLSI4: Practical VLSI: measurement and testing"
No time listed 4 h weekly

Offered In

  • Computational Science and Engineering Bachelor
    • Electives (In the ‘electives’ subcategory, at least two course units must be successfully completed.)
  • Computational Science and Engineering Master
    • Electives (In the ‘electives’ subcategory, at least two course units must be successfully completed.)
  • Electrical Engineering and Information Technology Master
    • Master Studies (Programme Regulations 2018)
      • Electronics and Photonics (The core courses and specialisation courses below are a selection for students who wish to specialise in the area of "Electronics and Photonics", see . The individual study plan is subject to the tutor's approval.)
        • Core Courses (These core courses are particularly recommended for the field of "Electronics and Photonics". You may choose core courses form other fields in agreement with your tutor. A minimum of 24 credits must be obtained from core courses during the MSc EEIT.)
          • Advanced Core Courses (Advanced core courses bring students to gain in-depth knowledge of the chosen specialization. They are MSc level only.)
      • Communication (The core courses and specialisation courses below are a selection for students who wish to specialise in the area of "Communication", see . The individual study plan is subject to the tutor's approval.)
        • Specialisation Courses (These specialisation courses are particularly recommended for the area of "Communication", but you are free to choose courses from any other field in agreement with your tutor. A minimum of 40 credits must be obtained from specialisation courses during the Master's Programme.)
    • Master Studies (Programme Regulations 2008)
  • Physics Master
    • Electives
      • General Electives (Students may choose General Electives from the entire course programme of ETH Zurich - with the following restrictions: courses that belong to the first or second year of a Bachelor curriculum at ETH Zurich as well as courses from GESS "Science in Perspective" are not eligible here. The following courses are explicitly recommended to physics students by their lecturers. (Courses in this list may be assigned to the category "General Electives" directly in myStudies. For the category assignment of other eligible courses keep the choice "no category" and take contact with the Study Administration ( ) after having received the credits.))