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651-1851-00L 1 Credits MSC D-ERDW

Introduction to Scanning Electron Microscopy

Does not take place this semester. Course is replaced by 651-0046-00, it will no longer take place.
VVZ CR n/a

Last Updated: 2026-02-05 15:48:33

Abstract

Introduction to Scanning Electron Microscopy and Microanalysis including Practical training.

Objective

Introduction in scanning electron microscopy and microanalysis. Obtain practical experience in operating a SEM.

Content

Functional principles and operation modes of a scanning electron microscope. Methods and application fields for - imaging (SE, BSE, FSE, AE, CL), - X-ray spectroscopy (EDX) - Electron diffraction (EBSD, Channeling, Orientation Imaging). Methods for sample preparation Practical exercises.

Resources

Lecture Notes

Scripts and operation manuals are provided during the course.

Literature

- Reed: Electron Microprobe Analysis and Scanning Electron Microscopy in Geology. Cambridge University Press (1996). - Schmidt: Praxis der Rasterelektronenmikroskopie und Mikrobereichsanalyse. Expert-Verlag Renningen-Malmsheim (1994). - Reimer, Pfefferkorn: Rasterelektronenmikroskopie. Springer Berlin (1973). - Goldstein et al: Scanning Elektron Microscopy and X-Ray Microanalysis. Plenum Press New York London (1981).

General Information

Language
English
Levels
MSC
Frequency
Yearly recurring

Examination

Type
ungraded semester performance

Course Components

Type Title Time & Place Hours
lecture with exercise Introduction to Scanning Electron Microscopy
Does not take place this semester.
No time listed 2 h weekly

Offered In

    • Electives (Courses can be chosen from the complete offerings of the ETH Zurich and University of Zurich (according to prior agreement with the subject advisor).)