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327-2135-00L 2 Credits MSC D-MATL

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Advanced Analytical TEM

Does not take place this semester. Number of participants limited to 12. Master students will have priority over PhD students. More information here:

VVZ CR n/a

Last Updated: 2026-02-05 15:36:27

Abstract

The course focuses on the fundamental understanding and hands-on knowledge of analytical Transmission Electron Microscopy (ATEM) techniques: electron dispersive X-ray analysis (EDX), energy filtered TEM and electron energy loss spectroscopy (EELS). The lectures will be followed by demonstrations and acquisition sessions TEM instruments.The lectures on statistical treatment of raw data sets and on

Objective

• Setting-up the optimal operation conditions for reliable EDX analysis and quantification. • Setting-up the optimal operation conditions for the reliable EFTEM analyses. • Setting-up the optimal operation conditions for the reliable EELS analyses. • EDX data acquisition, on-line analysis and quantification. • EFTEM data acquisition and analysis. • EELS acquisition analyses.

Content

1. Fundamentals of analytical TEM. 2. Electron Optics and Instrumentation. Spectrum Imaging. 3. Quantitative X-ray Spectrometry. 4. EELS. 5. EFTEM. 6. Statistical treatment of raw data. 7. EDX. Quantification and data evaluation. 8. Demonstrations on EDX, EELS, and EFTEM data acquisitions. 9. Practical sessions for students with provided specimens. Practical sessions for students with their own specimens. 10. Questions and such: open discussion. 11. Student presentations.

Resources

Literature

• Egerton: Physical Principles of Electron Microscopy: an introduction to TEM, SEM and AEM, Springer Verlag, 2007 • Williams, Carter: Transmission Electron Microscopy, Plenum Press, 2nd Edition 2009 • Egerton: Electron Energy-Loss Spectroscopy in the Electron Microscopy, 3rd Edition, Springer, 2011.

General Information

Language: English
Levels: MSC
Frequency: Semesterly recurring

Examination

Type: ungraded semester performance

Registration & Places

Signup End: 21.09.2020

Course Components

Type	Title	Time & Place	Hours
lecture with exercise	Advanced Analytical TEM Does not take place this semester.	No time listed	40 h semesterly

Offered In

Materials Science Master
- Elective Courses (The students are free to choose individually from the entire course offer of ETH Zürich on the Master level. Please consult the study administration in case of questions.)