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Microscopy Training SEM I - Introduction to SEM
Last Updated: 2026-02-05 15:36:30
Abstract
This introductory course on Scanning Electron Microscopy (SEM) emphasizes hands-on learning. Using ScopeM SEMs, students have the opportunity to study their own samples (or samples provided) and solve practical problems by applying knowledge acquired during the lectures. At the end of the course, students will be able to apply SEM for their (future) research projects.
Objective
- Set-up, align and operate a SEM successfully and safely. - Understand important operational parameters of SEM and optimize microscope performance. - Explain different signals in SEM and obtain secondary electron (SE) and backscatter electron (BSE) images. - Operate the SEM in low-vacuum mode. - Make use of EDX for semi-quantitative elemental analysis. - Prepare samples with different techniques and equipment for imaging and analysis by SEM.
Content
During the course, students learn through lectures, demonstrations, and hands-on sessions how to setup and operate SEM instruments, including low-vacuum and low-voltage applications. This course gives basic skills for students new to SEM. At the end of the course, students are able to align an SEM, to obtain secondary electron (SE) and backscatter electron (BSE) images and to perform energy dispersive X-ray spectroscopy (EDX) semi-quantitative analysis. Emphasis is put on procedures to optimize SEM parameters in order to best solve practical problems and deal with a wide range of materials. Lectures: - Introduction on Electron Microscopy and instrumentation - electron sources, electron lenses and probe formation - beam/specimen interaction, image formation, image contrast and imaging modes. - sample preparation techniques for EM - X-ray micro-analysis (theory and detection), qualitative and semi-quantitative EDX and point analysis, linescan and spectral mapping Practicals: - Brief description and demonstration of the SEM microscope - Practice on image formation, image contrast (and image processing) - Student participation on sample preparation techniques - Scanning Electron Microscopy lab exercises: setup and operate the instrument under various imaging modalities - Practice on real-world samples and report results
Resources
Lecture Notes
Lecture notes will be distributed.
Literature
- Peter Goodhew, John Humphreys, Richard Beanland: Electron Microscopy and Analysis, 3rd ed., CRC Press, 2000 - Joseph Goldstein, et al, Scanning Electron Microscopy and X-Ray Microanalysis, 4th ed, Srpinger US, 2018 - Egerton: Physical Principles of Electron Microscopy: an introduction to TEM, SEM and AEM, Springer Verlag, 2007
General Information
- Language
- English
- Levels
- DR , MSC
- Frequency
- Semesterly recurring
Examination
- Type
- ungraded semester performance
Registration & Places
- Signup End
- 19.10.2020
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| practical/laboratory course |
Microscopy Training SEM I - Introduction to SEM
This block course will take place during 5 full days (9am-5pm) on September 28 - October 2, 2020. Lectures will be held in the seminar room, practical exercises in rooms of ScopeM.
The repetition of this course will take place from November 2-6, 2020.
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35 h semesterly |
Offered In
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Elective Courses (The students are free to choose individually from the entire course offer of ETH Zürich on the Master level. Please consult the study administration in case of questions.)
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General Electives (Students may choose General Electives from the entire course programme of ETH Zurich - with the following restrictions: courses that belong to the first or second year of a Bachelor curriculum at ETH Zurich as well as courses from GESS "Science in Perspective" are not eligible here. The following courses are explicitly recommended to physics students by their lecturers. (Courses in this list may be assigned to the category "General Electives" directly in myStudies. For the category assignment of other eligible courses keep the choice "no category" and take contact with the Study Administration ( ) after having received the credits.))
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Doctoral Department of Materials Science (Further information at: )
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