VVZ API is not affiliated with ETH Zurich. Data might be outdated or incorrect. Please view the official ETHZ Vorlesungsverzeichnis for binding information.
Microsystems I: Process Technology and Integration
Last Updated: 2026-02-05 15:35:58
Abstract
Students are introduced to the fundamentals of semiconductors, the basics of micromachining and silicon process technology and will learn about the fabrication of microsystems and -devices by a sequence of defined processing steps (process flow).
Objective
Students are introduced to the basics of micromachining and silicon process technology and will understand the fabrication of microsystem devices by the combination of unit process steps ( = process flow).
Content
- Introduction to microsystems technology (MST) and micro electro mechanical systems (MEMS) - Basic silicon technologies: Thermal oxidation, photolithography and etching, diffusion and ion implantation, thin film deposition. - Specific microsystems technologies: Bulk and surface micromachining, dry and wet etching, isotropic and anisotropic etching, beam and membrane formation, wafer bonding, thin film mechanical properties. Application of selected technologies will be demonstrated on case studies.
Resources
Lecture Notes
Handouts (available online)
Literature
- S.M. Sze: Semiconductor Devices, Physics and Technology - W. Menz, J. Mohr, O.Paul: Microsystem Technology - Hong Xiao: Introduction to Semiconductor Manufacturing Technology - M. J. Madou: Fundamentals of Microfabrication and Nanotechnology, 3rd ed. - T. M. Adams, R. A. Layton: Introductory MEMS, Fabrication and Applications
General Information
- Language
- English
- Levels
- BSC , MSC
- Frequency
- Yearly recurring
Examination
- Type
- session examination
- Mode
- oral 20 minutes
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| lecture |
Microsystems I: Process Technology and Integration
The lecture starts in the second week of the Semester. This course will be taught in a hybrid of online and face-to-face classroom formats; students can choose to attend the class on campus or to join the live streaming class.
|
|
3 h weekly |
| exercise |
Microsystems I: Process Technology and Integration
The exercise starts in the third week of the Semester. This course will be taught in a hybrid of online and face-to-face classroom formats; students can choose to attend the class on campus or to join the live streaming class.
|
|
3 h weekly |
Offered In
-
-
-
-
Mechatronics (Focus Coordinator: Prof. Bradley Nelson To achieve the 20 credits for Focus Specialization Mechatronics, 151-0640-00L Studies on Mechatronics is compulsory.)
-
Microsystems and Nanoscale Engineering (Focus Coordinator: Prof. Christofer Hierold)
-
Biomedical Engineering (Focus Coordinator: Prof. Edoardo Mazza)
-
-
-
-
-
Electives (This is only a small selection. Other courses from the ETH course catalogue may be chosen. Please consult the "Richtlinien zu Projekten, Praktika, Seminare" (German only), published on our website ( ).)
-
-
-
-
Micro & Nanosystems (The courses listed in this category “Core Courses” are recommended. Alternative courses can be chosen in agreement with the tutor.)
-
-
-
-
-
-
Track Core Courses (During the Master programme, a minimum of 12 CP must be obtained from track core courses.)
-
-
-
-
-
-
-
-
General Electives (Students may choose General Electives from the entire course programme of ETH Zurich - with the following restrictions: courses that belong to the first or second year of a Bachelor curriculum at ETH Zurich as well as courses from GESS "Science in Perspective" are not eligible here. The following courses are explicitly recommended to physics students by their lecturers. (Courses in this list may be assigned to the category "General Electives" directly in myStudies. For the category assignment of other eligible courses keep the choice "no category" and take contact with the Study Administration ( ) after having received the credits.))
-
-