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Abstract
The lecture combines quasi-ballistic transport theory with application to realistic devicesof current and future CMOS technology.All aspects such as quantum mechanics, phonon scattering or Monte Carlo techniques tosolve the Boltzmann equation are introduced. In the exercises advanced devices suchas FinFETs and nanosheets are simulated.
Objective
The aim of the course is a fundamental understanding of the derivation of the Boltzmann equation and its solution by Monte Carlo methods. The practical aspect is to become familiar with technology computer-aided design (TCAD) and perform simulations of advanced CMOS devices.
Content
The covered topics include: - quantum mechanics and second quantization, - band structure calculation including the pseudopotential method - phonons - derivation of the Boltzmann equation including scattering in the Markov limit - stochastic Monte Carlo techniques to solve the Boltzmann equation - TCAD environment and geometry generation - Stationary bulk Monte Carlo simulation of velocity-field curves - Transient Monte Carlo simulation for quasi-ballistic velocity overshoot - Monte Carlo device simulation of FinFETs and nanosheets
Resources
Lecture Notes
Lecture notes (in German)
Literature
Further reading will be recommended in the lecture.
Learning Materials (Links)
- Main link
- Information
General Information
- Language
- English
- Levels
- BSC , MSC
- Frequency
- Yearly recurring
Examination
- Type
- session examination
- Mode
- oral 30 minutes
Course Components
| Type | Title | Time & Place | Hours |
|---|---|---|---|
| lecture with exercise |
Semiconductor Devices: Transport Theory and Monte Carlo Simulation
Does not take place this semester.
|
No time listed | 30 h semesterly |
Offered In
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Application Area (Only necessary and eligible for the Master degree in Applied Mathematics. One of the application areas specified must be selected for the category Application Area for the Master degree in Applied Mathematics. At least 8 credits are required in the chosen application area.)
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Electronics and Photonics (The core courses and specialisation courses below are a selection for students who wish to specialise in the area of "Electronics and Photonics", see . The individual study plan is subject to the tutor's approval.)
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Specialisation Courses (These specialisation courses are particularly recommended for the area of "Electronics and Photonics", but you are free to choose courses from any other field in agreement with your tutor. A minimum of 40 credits must be obtained from specialisation courses during the Master's Programme.)
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Major Courses (A total of 42 CP must be achieved during the Master Programme. The individual study plan is subject to the tutor's approval.)
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Recommended Subjects (These courses are recommended, but you are free to choose courses from any other special field. Please consult your tutor.)
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General Electives (Students may choose General Electives from the entire course programme of ETH Zurich - with the following restrictions: courses that belong to the first or second year of a Bachelor curriculum at ETH Zurich as well as courses from GESS "Science in Perspective" are not eligible here. The following courses are explicitly recommended to physics students by their lecturers. (Courses in this list may be assigned to the category "General Electives" directly in myStudies. For the category assignment of other eligible courses keep the choice "no category" and take contact with the Study Administration ( ) after having received the credits.))
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