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327-2140-00L 1 Credits DR , MSC D-MATL , D-MAVT

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Microscopy Training FIB-SEM

Lecturers & Examiners: Dr. Karsten Kunze, Dr. Joakim Reuteler, Dr. Stephan Gerstl, Dr. Anne Greet Bittermann, Dr. Luiz Grafulha Morales, Dr. Peng Zeng

Number of participants limited to 6. PhD students will be asked for a fee. Registration form: ( )

VVZ CR n/a

Last Updated: 2026-02-05 15:42:01

Abstract

The introductory course on Focused Ion Beam (FIB) provides theoretical and hands-on learning for new operators, utilizing lectures, demonstrations and hands-on sessions.

Objective

- Set-up, align and operate a FIB-SEM successfully and safely. - Accomplish operation tasks and optimize microscope performances. - Perform sample preparation (TEM lamella, APT probe…) using FIB-SEM. - Perform other FIB techniques, such as characterization - At the end of the course, students will know how to set-up FIB-SEM, how to prepare TEM lamella/APT probe and how to utilize FIB techniques.

Content

This course provides FIB techniques to students with previous SEM experience. - Overview of FIB theory, instrumentation, operation and applications. - Introduction and discussion on FIB and instrumentation. - Lectures on FIB theory. - Lectures on FIB applications. - Practicals on FIB-SEM set-up, cross-beam alignment. - Practicals on site-specific cross-section and TEM lamellar preparation. - Lecture and demonstration on FIB automation.

Resources

Literature

- Detailed course manual. - Giannuzzi, Stevie: Introduction to focused ion beams instrumentation, theory, techniques, and practice, Springer, 2005. - Orloff, Utlaut, Swanson: High resolution focused ion beams: FIB and its applications, Kluwer Academic/Plenum Publishers, 2003.

General Information

Language: English
Levels: DR , MSC
Frequency: Semesterly recurring

Examination

Type: ungraded semester performance

Student presentation and discussion during course.

Registration & Places

Signup End: 13.04.2020

Course Components

Type	Title	Time & Place	Hours
practical/laboratory course	Microscopy Training FIB-SEM This 3-day-course will NOT take place in April (27-29) - further information will follow soon.	No time listed	21 h semesterly

Offered In

Materials Science Master
- Elective Courses (The students are free to choose individually from the entire course offer of ETH Zürich on the Master level. Please consult the study administration in case of questions.)
Doctoral Department of Mechanical and Process Engineering (More Information at: )
- Doctoral and Post-Doctoral Courses
Doctoral Department of Materials Science (Further information at: )
- Doctoral and Post-Doctoral Courses